Engineers in the US have fabricated 2D micropatterns and 3D suspended thin-film structures using carbon nanotubes as a building block via lithography-compatible layer-by-layer nano self-assembly. They used well established IC fabrication techniques along with the “bottom-up” construction of nanotubes and applied a further process to manufacture the suspended micro-beam, which is a basic structure for actuators in micro/nanoscale systems.

http://nanotechweb.org/cws/article/lab/45933